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- 2010459234 contributor B11965094.
- 2010459234 contributor B11965095.
- 2010459234 created "c2008.".
- 2010459234 date "2008".
- 2010459234 date "c2008.".
- 2010459234 dateCopyrighted "c2008.".
- 2010459234 description "Includes bibliographical references and author index.".
- 2010459234 extent "1 v. (various pagings) :".
- 2010459234 identifier "0819471100".
- 2010459234 identifier "9780819471109".
- 2010459234 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6925".
- 2010459234 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6925.".
- 2010459234 issued "2008".
- 2010459234 issued "c2008.".
- 2010459234 language "eng".
- 2010459234 publisher "Bellingham, Wash. : SPIE,".
- 2010459234 subject "621.382 22".
- 2010459234 subject "Integrated circuits Defects Analysis Congresses.".
- 2010459234 subject "Integrated circuits Design and construction Congresses.".
- 2010459234 subject "Microelectronics industry Quality control Congresses.".
- 2010459234 subject "Quality control Congresses.".
- 2010459234 subject "Semiconductor wafers Defects Analysis Congresses.".
- 2010459234 subject "Semiconductors Design and construction Congresses.".
- 2010459234 subject "TK7874 .D474977 2008".
- 2010459234 title "Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA / Vivek K. Singh, Michael L. Rieger, editors ; sponsored by SPIE ; cooperating organization, SEMATECH (USA).".
- 2010459234 type "text".