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- 2010459262 contributor B11965154.
- 2010459262 contributor B11965155.
- 2010459262 created "2008.".
- 2010459262 date "2008".
- 2010459262 date "2008.".
- 2010459262 dateCopyrighted "2008.".
- 2010459262 description "Includes bibliographical references and author index.".
- 2010459262 extent "1 v. (various pagings) :".
- 2010459262 identifier "0819471933 (pbk.)".
- 2010459262 identifier "9780819471932 (pbk.)".
- 2010459262 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6995".
- 2010459262 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6995.".
- 2010459262 issued "2008".
- 2010459262 issued "2008.".
- 2010459262 language "eng".
- 2010459262 publisher "Bellingham, Wash. : SPIE,".
- 2010459262 subject "681/.25 22".
- 2010459262 subject "Metrology Congresses.".
- 2010459262 subject "Microscopy Congresses.".
- 2010459262 subject "Optical measurements Congresses.".
- 2010459262 subject "Optical measurements Industrial applications Congresses.".
- 2010459262 subject "Photonics Congresses.".
- 2010459262 subject "QC367 .O5892 2008".
- 2010459262 title "Optical micro- and nanometrology in microsystems technology II : 8-10 April 2008, Strasbourg, France / Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, editors ; sponsored by SPIE Europe ; cosponsored by Alsace international (France) ... [et al.] ; cooperating organizations, AFOP--Association française des industries de l'optique et de la photonique (France) ... [et al.].".
- 2010459262 type "text".