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- 2010459267 alternative "Modeling aspects in optical metrology 2".
- 2010459267 alternative "Modeling aspects in optical metrology two".
- 2010459267 contributor B11965164.
- 2010459267 contributor B11965165.
- 2010459267 created "2009.".
- 2010459267 date "2009".
- 2010459267 date "2009.".
- 2010459267 dateCopyrighted "2009.".
- 2010459267 description "Includes bibliographical references and author index.".
- 2010459267 extent "1 v. (various pagings) :".
- 2010459267 identifier "0819476730".
- 2010459267 identifier "9780819476739".
- 2010459267 isPartOf "Proceedings of SPIE, 0277-786X ; v. 7390".
- 2010459267 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 7390.".
- 2010459267 issued "2009".
- 2010459267 issued "2009.".
- 2010459267 language "eng".
- 2010459267 publisher "Bellingham, Wash. : SPIE,".
- 2010459267 subject "681/.25 22".
- 2010459267 subject "Integrated circuits Congresses.".
- 2010459267 subject "Optical measurements Congresses.".
- 2010459267 subject "QC367 .M6352 2009".
- 2010459267 subject "Semiconductors Design and construction Congresses.".
- 2010459267 title "Modeling aspects in optical metrology 2".
- 2010459267 title "Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany / Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).".
- 2010459267 title "Modeling aspects in optical metrology two".
- 2010459267 type "text".