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- 2010459330 alternative "Smart sensors, actuators, and MEMS 4".
- 2010459330 alternative "Smart sensors, actuators, and MEMS four".
- 2010459330 contributor B11965292.
- 2010459330 contributor B11965293.
- 2010459330 created "c2009.".
- 2010459330 date "2009".
- 2010459330 date "c2009.".
- 2010459330 dateCopyrighted "c2009.".
- 2010459330 description "Includes bibliographical references and index.".
- 2010459330 extent "1 v. (various pagings) :".
- 2010459330 identifier "0819476366".
- 2010459330 identifier "9780819476364".
- 2010459330 isPartOf "Proceedings of SPIE, 0277-786X ; v. 7362".
- 2010459330 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 7362.".
- 2010459330 issued "2009".
- 2010459330 issued "c2009.".
- 2010459330 language "eng".
- 2010459330 publisher "Bellingham, Wash. : SPIE,".
- 2010459330 subject "621.381 23".
- 2010459330 subject "Actuators Industrial applications Congresses.".
- 2010459330 subject "Detectors Industrial applications Congresses.".
- 2010459330 subject "Microelectromechanical systems Congresses.".
- 2010459330 subject "Microtechnology Congresses.".
- 2010459330 subject "Scanning systems Congresses.".
- 2010459330 subject "TK7875 .S6355 2009".
- 2010459330 title "Smart sensors, actuators, and MEMS 4".
- 2010459330 title "Smart sensors, actuators, and MEMS IV : 4-6 May 2009, Dresden, Germany / Ulrich Schmid, Carles Cané, Herbert Shea, editors ; sponsored by SPIE Europe, [and] GMM VDE/VDI Gesellschaft Mikroelektronik, Mikro- und Feinmechanik ; cooperating organizations, SPIE ... [et al.].".
- 2010459330 title "Smart sensors, actuators, and MEMS four".
- 2010459330 type "text".