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- 2010459401 contributor B11965415.
- 2010459401 contributor B11965416.
- 2010459401 contributor B11965417.
- 2010459401 created "c2008.".
- 2010459401 date "2008".
- 2010459401 date "c2008.".
- 2010459401 dateCopyrighted "c2008.".
- 2010459401 description "Includes bibliographical references and indexes.".
- 2010459401 extent "[xiv], 325 p. :".
- 2010459401 identifier "1558999906".
- 2010459401 identifier "9781558999909".
- 2010459401 identifier 2010459401-d.html.
- 2010459401 isPartOf "Materials Research Society symposium proceedings ; v. 1052".
- 2010459401 issued "2008".
- 2010459401 issued "c2008.".
- 2010459401 language "eng".
- 2010459401 publisher "Warrendale, Pa. : Materials Research Society,".
- 2010459401 subject "621.381 22".
- 2010459401 subject "Microelectromechanical systems Congresses.".
- 2010459401 subject "Microelectromechanical systems Materials Congresses.".
- 2010459401 subject "TK7875 .M5328 2007".
- 2010459401 title "Microelectromechanical systems, materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, USA / editors, David A. LaVan ... [et al.].".
- 2010459401 type "text".