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- 2010459436 alternative "Micromachining and microfabrication process technology 15".
- 2010459436 alternative "Micromachining and microfabrication process technology fifteen".
- 2010459436 contributor B11965453.
- 2010459436 contributor B11965454.
- 2010459436 created "c2010.".
- 2010459436 date "2010".
- 2010459436 date "c2010.".
- 2010459436 dateCopyrighted "c2010.".
- 2010459436 description "Includes bibliographical references.".
- 2010459436 extent "1 v. (various pagings) :".
- 2010459436 identifier "0819479861".
- 2010459436 identifier "9780819479860".
- 2010459436 isPartOf "Proceedings of SPIE, 0277-786X ; v. 7590".
- 2010459436 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 7590.".
- 2010459436 issued "2010".
- 2010459436 issued "c2010.".
- 2010459436 language "eng".
- 2010459436 publisher "Bellingham, Wash. : SPIE,".
- 2010459436 subject "671.3/5 22".
- 2010459436 subject "Electromechanical devices Design and construction Congresses.".
- 2010459436 subject "Microfabrication Congresses.".
- 2010459436 subject "Micromachining Congresses.".
- 2010459436 subject "Miniature electronic equipment Design and construction Congresses.".
- 2010459436 subject "TJ1191.5 .M55243235 2010".
- 2010459436 title "Micromachining and microfabrication process technology 15".
- 2010459436 title "Micromachining and microfabrication process technology XV : 26 January 2010, San Francisco, California, United States / Mary Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored and published by SPIE.".
- 2010459436 title "Micromachining and microfabrication process technology fifteen".
- 2010459436 type "text".