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- 2010483564 contributor B11985839.
- 2010483564 contributor B11985840.
- 2010483564 created "c2008.".
- 2010483564 date "2008".
- 2010483564 date "c2008.".
- 2010483564 dateCopyrighted "c2008.".
- 2010483564 description "Includes bibliographical references and index.".
- 2010483564 extent "1 v. (various pagings) :".
- 2010483564 identifier "0819469718".
- 2010483564 identifier "9780819469717".
- 2010483564 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6800".
- 2010483564 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6800.".
- 2010483564 issued "2008".
- 2010483564 issued "c2008.".
- 2010483564 language "eng".
- 2010483564 publisher "Bellingham, Wash. : SPIE,".
- 2010483564 subject "621.381 22".
- 2010483564 subject "Microelectromechanical systems Congresses.".
- 2010483564 subject "Nanotechnology Congresses.".
- 2010483564 subject "Photolithography Congresses.".
- 2010483564 subject "Photomechanical processes Congresses.".
- 2010483564 subject "Photonics Congresses.".
- 2010483564 subject "TK7875 .D484 2007".
- 2010483564 title "Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia / Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia).".
- 2010483564 type "text".