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- 2010483565 alternative "ICMNE-2007".
- 2010483565 contributor B11985841.
- 2010483565 contributor B11985842.
- 2010483565 contributor B11985843.
- 2010483565 created "c2008.".
- 2010483565 date "2008".
- 2010483565 date "c2008.".
- 2010483565 dateCopyrighted "c2008.".
- 2010483565 description "Includes bibliographical references and index.".
- 2010483565 extent "1 v. (various pagings) :".
- 2010483565 identifier "0819472387".
- 2010483565 identifier "9780819472380".
- 2010483565 isPartOf "Proceedings of SPIE ; v. 7025".
- 2010483565 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 7025.".
- 2010483565 issued "2008".
- 2010483565 issued "c2008.".
- 2010483565 language "eng".
- 2010483565 publisher "Bellingham, Wash. : SPIE,".
- 2010483565 subject "621.81 22".
- 2010483565 subject "Lithography Congresses.".
- 2010483565 subject "Microelectronics Congresses.".
- 2010483565 subject "Nanotechnology Congresses.".
- 2010483565 subject "Photonics Congresses.".
- 2010483565 subject "TK7874 .I165 2007".
- 2010483565 title "ICMNE-2007".
- 2010483565 title "Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia / Kamil A. Vaiev, Alexander A. Orlikovsky, editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences (Russia), SPIE Russia Chapter ; sponsored by Russian Foundation for Basic Research (Russia) ... [et al.] ; published by SPIE.".
- 2010483565 type "text".