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- 2010483584 contributor B11985870.
- 2010483584 contributor B11985871.
- 2010483584 contributor B11985869.
- 2010483584 created "c2009.".
- 2010483584 date "2009".
- 2010483584 date "c2009.".
- 2010483584 dateCopyrighted "c2009.".
- 2010483584 description "Includes bibliographical references and indexes.".
- 2010483584 extent "xi, 247 p. :".
- 2010483584 identifier "1605111112".
- 2010483584 identifier "9781605111117".
- 2010483584 identifier 2010483584-d.html.
- 2010483584 isPartOf "Materials Research Society symposia proceedings ; v. 1139.".
- 2010483584 isPartOf "Materials Research Society symposium proceedings, 1946-4274 ; v. 1139".
- 2010483584 issued "2009".
- 2010483584 issued "c2009.".
- 2010483584 language "eng".
- 2010483584 publisher "Warrendale, Pa. : Materials Research Society,".
- 2010483584 subject "321.381 22".
- 2010483584 subject "Microelectromechanical systems Congresses.".
- 2010483584 subject "Microelectromechanical systems Materials Congresses.".
- 2010483584 subject "Nanostructured materials Congresses.".
- 2010483584 subject "Silicon Congresses.".
- 2010483584 subject "TK7875 .S96 2008".
- 2010483584 subject "Thin films Congresses.".
- 2010483584 title "Microelectromechanical systems--materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. / editors, Srikar Vengallatore ... [et al.].".
- 2010483584 type "text".