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- 2010540027 contributor B12038005.
- 2010540027 contributor B12038004.
- 2010540027 date "2007".
- 2010540027 description "Includes bibliographical references and indexes.".
- 2010540027 extent "xi, 371 p. :".
- 2010540027 identifier "1558999515".
- 2010540027 identifier "9781558999510".
- 2010540027 identifier 2010540027-d.html.
- 2010540027 isPartOf "Materials Research Society symposia proceedings ; v. 991.".
- 2010540027 isPartOf "Materials Research Society symposium proceedings ; v. 991".
- 2010540027 issued "2007".
- 2010540027 language "eng".
- 2010540027 publisher "Warrendale, Pa. : Materials Research Society, c2007.".
- 2010540027 subject "621.3815/2 23".
- 2010540027 subject "Chemical mechanical planarization Congresses.".
- 2010540027 subject "Chimie des surfaces Congrès. ram".
- 2010540027 subject "Semiconducteurs Défauts Congrès. ram".
- 2010540027 subject "Semiconductors Materials Congresses.".
- 2010540027 subject "Semiconductors Surfaces Congresses.".
- 2010540027 subject "TK7871.85 .S95325 2007".
- 2010540027 title "Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. / editors, Gerfried Zwicker ... [et al.].".
- 2010540027 type "text".