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- 2010938144 contributor B12096310.
- 2010938144 contributor B12096311.
- 2010938144 created "c2010.".
- 2010938144 date "2010".
- 2010938144 date "c2010.".
- 2010938144 dateCopyrighted "c2010.".
- 2010938144 description "Includes bibliographical references (p. 159-170) and index.".
- 2010938144 extent "xviii, 173 p. :".
- 2010938144 hasFormat "Rare-earth implanted MOS devices for silicon photonics.".
- 2010938144 identifier "3642144462 (hdbk. : acid-free paper)".
- 2010938144 identifier "9783642144462 (hdbk. : acid-free paper)".
- 2010938144 isFormatOf "Rare-earth implanted MOS devices for silicon photonics.".
- 2010938144 isPartOf "Springer series in materials science ; v. 142.".
- 2010938144 isPartOf "Springer series in materials science, 0933-033X ; 142".
- 2010938144 issued "2010".
- 2010938144 issued "c2010.".
- 2010938144 language "eng".
- 2010938144 publisher "Heidelberg : Springer,".
- 2010938144 relation "Rare-earth implanted MOS devices for silicon photonics.".
- 2010938144 subject "621.39/732 23".
- 2010938144 subject "Metal oxide semiconductors.".
- 2010938144 subject "TK7871.99.M44 R44 2010".
- 2010938144 title "Rare-earth implanted MOS devices for silicon photonics : microstructural, electrical and optoelectronic properties / Lars Rebohle, Wolfgang Skorupa.".
- 2010938144 type "text".