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- 2011004247 contributor B12104360.
- 2011004247 created "2011.".
- 2011004247 date "2011".
- 2011004247 date "2011.".
- 2011004247 dateCopyrighted "2011.".
- 2011004247 description "Includes bibliographical references and index.".
- 2011004247 description "Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.".
- 2011004247 extent "xi, 166 p., [16] p. of plates :".
- 2011004247 identifier "0521889251 (hardback)".
- 2011004247 identifier "1107645794 (pbk.)".
- 2011004247 identifier "9780521889254 (hardback)".
- 2011004247 identifier "9781107645790 (pbk.)".
- 2011004247 identifier 9780521889254.jpg.
- 2011004247 issued "2011".
- 2011004247 issued "2011.".
- 2011004247 language "eng".
- 2011004247 publisher "Cambridge, UK ; New York : Cambridge University Press,".
- 2011004247 subject "621.381 22".
- 2011004247 subject "Microelectromechanical systems.".
- 2011004247 subject "TK7875 .K83 2011".
- 2011004247 tableOfContents "Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.".
- 2011004247 title "A guide to hands-on MEMS design and prototyping / Joel Kubby.".
- 2011004247 type "text".
