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- 2011014406 alternative "Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology".
- 2011014406 contributor B12116585.
- 2011014406 created "c2012.".
- 2011014406 date "2012".
- 2011014406 date "c2012.".
- 2011014406 dateCopyrighted "c2012.".
- 2011014406 description "Includes bibliographical references and index.".
- 2011014406 description "v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.".
- 2011014406 extent "3 v. :".
- 2011014406 identifier "1420055119 (v. 1)".
- 2011014406 identifier "142005516X (v. 3)".
- 2011014406 identifier "1420055194 (v. 2)".
- 2011014406 identifier "9781420055115 (v. 1)".
- 2011014406 identifier "9781420055160 (v. 3)".
- 2011014406 identifier "9781420055191 (v. 2)".
- 2011014406 identifier pod.cgi?CouttsID=cou7021486.
- 2011014406 issued "2012".
- 2011014406 issued "c2012.".
- 2011014406 language "eng".
- 2011014406 publisher "Boca Raton, FL : CRC Press,".
- 2011014406 subject "620/.5 23".
- 2011014406 subject "Microelectromechanical systems.".
- 2011014406 subject "Microfluidics.".
- 2011014406 subject "Nanoelectromechanical systems.".
- 2011014406 subject "Solid-state physics.".
- 2011014406 subject "TK7875 .M33 2012".
- 2011014406 tableOfContents "v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.".
- 2011014406 title "Fundamentals of microfabrication and nanotechnology / Marc J. Madou.".
- 2011014406 title "Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology".
- 2011014406 type "text".