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- 2011276747 contributor B12164849.
- 2011276747 created "2012.".
- 2011276747 date "2012".
- 2011276747 date "2012.".
- 2011276747 dateCopyrighted "2012.".
- 2011276747 description "Includes bibliographical references (p. 183-185) and index.".
- 2011276747 extent "xviii, 191 p. :".
- 2011276747 identifier "1437778178 (hbk.)".
- 2011276747 identifier "9781437778175 (hbk.)".
- 2011276747 isPartOf "Micro & nano technologies.".
- 2011276747 isPartOf "Micro and nano technologies series".
- 2011276747 issued "2012".
- 2011276747 issued "2012.".
- 2011276747 language "eng".
- 2011276747 publisher "Waltham, [MA] : William Andrew,".
- 2011276747 subject "621.3815 23".
- 2011276747 subject "Microelectromechanical systems Design and construction.".
- 2011276747 subject "Nanoelectronics.".
- 2011276747 subject "TK7871.15.F5 D67 2012".
- 2011276747 subject "Thick-film circuits Design and construction.".
- 2011276747 title "Ceramic thick films for MEMS and microdevices / Robert A. Dorey.".
- 2011276747 type "text".