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- 2011292641 contributor B12181027.
- 2011292641 contributor B12181028.
- 2011292641 contributor B12181026.
- 2011292641 created "2011.".
- 2011292641 date "2011".
- 2011292641 date "2011.".
- 2011292641 dateCopyrighted "2011.".
- 2011292641 description "Includes bibliographical references and indexes.".
- 2011292641 extent "ix, 207 p. :".
- 2011292641 identifier "1605112763".
- 2011292641 identifier "9781605112763".
- 2011292641 identifier displayIssue?jid=OPL&volumeId=1299.
- 2011292641 identifier 2011292641-d.html.
- 2011292641 identifier 2011292641-t.html.
- 2011292641 isPartOf "Materials Research Society symposia proceedings ; v. 1299.".
- 2011292641 isPartOf "Materials Research Society symposium proceedings, 1946-4274 ; v. 1299".
- 2011292641 issued "2011".
- 2011292641 issued "2011.".
- 2011292641 language "eng".
- 2011292641 publisher "Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press,".
- 2011292641 subject "Microelectromechanical systems Congresses.".
- 2011292641 subject "Microelectromechanical systems Materials Congresses.".
- 2011292641 subject "Nanostructured materials Congresses.".
- 2011292641 subject "Silicon Congresses.".
- 2011292641 subject "TK7875 .S968 2010".
- 2011292641 subject "Thin films Congresses.".
- 2011292641 title "Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / editors, Frank W. DelRio ... [et al.].".
- 2011292641 type "text".