Matches in Library of Congress for { <http://lccn.loc.gov/2011293385> ?p ?o. }
Showing items 1 to 28 of
28
with 100 items per page.
- 2011293385 alternative "Optical microlithography 23".
- 2011293385 alternative "Optical microlithography twenty-three".
- 2011293385 contributor B12181729.
- 2011293385 contributor B12181730.
- 2011293385 created "c2010.".
- 2011293385 date "2010".
- 2011293385 date "c2010.".
- 2011293385 dateCopyrighted "c2010.".
- 2011293385 description "Includes bibliographical references and author index.".
- 2011293385 extent "2 v. :".
- 2011293385 identifier "0819480541 (pbk.)".
- 2011293385 identifier "9780819480545 (pbk.)".
- 2011293385 isPartOf "Proceedings of SPIE, 0277-786X ; v. 7640".
- 2011293385 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 7640.".
- 2011293385 issued "2010".
- 2011293385 issued "c2010.".
- 2011293385 language "eng".
- 2011293385 publisher "Bellingham, Wash. : SPIE,".
- 2011293385 subject "621.3815/31 23".
- 2011293385 subject "Integrated circuits Masks Congresses.".
- 2011293385 subject "Manufacturing processes Congresses.".
- 2011293385 subject "Microlithography Congresses.".
- 2011293385 subject "TK7835 .O6653 2010".
- 2011293385 subject "X-ray lithography Congresses.".
- 2011293385 title "Optical microlithography 23".
- 2011293385 title "Optical microlithography XXIII : 23-25 February 2010, San Jose, California, United States / Mircea V. Dusa, Will Conley, editors ; sponsored and published by SPIE; cooperating organization, SEMATECH Inc. (United States).".
- 2011293385 title "Optical microlithography twenty-three".
- 2011293385 type "text".