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- 2011377954 alternative "MOEMS and miniaturized systems 10".
- 2011377954 alternative "MOEMS and miniaturized systems ten".
- 2011377954 contributor B12247103.
- 2011377954 contributor B12247104.
- 2011377954 created "c2011.".
- 2011377954 date "2011".
- 2011377954 date "c2011.".
- 2011377954 dateCopyrighted "c2011.".
- 2011377954 description "Includes bibliographical references and author index.".
- 2011377954 extent "1 v. (various pagings) :".
- 2011377954 identifier "0819484679 (pbk.)".
- 2011377954 identifier "9780819484673 (pbk.)".
- 2011377954 isPartOf "Proceedings of SPIE, 0277-786X ; v. 7930".
- 2011377954 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 7930. 0277-786X".
- 2011377954 issued "2011".
- 2011377954 issued "c2011.".
- 2011377954 language "eng".
- 2011377954 publisher "Bellingham, Wash. : SPIE,".
- 2011377954 subject "621.381 23".
- 2011377954 subject "Microelectromechanical systems Congresses.".
- 2011377954 subject "Micromechanics Congresses.".
- 2011377954 subject "Miniature electronic equipment Congresses.".
- 2011377954 subject "Optical scanners Congresses.".
- 2011377954 subject "TK7874 .M532582 2011".
- 2011377954 title "MOEMS and miniaturized systems 10".
- 2011377954 title "MOEMS and miniaturized systems X : 24-26 January 2011, San Francisco, California, United States / Harald Schenk, Wibool Piyawattanametha, editors ; sponsored ... by SPIE.".
- 2011377954 title "MOEMS and miniaturized systems ten".
- 2011377954 type "text".