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- 2011377975 contributor B12247141.
- 2011377975 contributor B12247142.
- 2011377975 created "c2011.".
- 2011377975 date "2011".
- 2011377975 date "c2011.".
- 2011377975 dateCopyrighted "c2011.".
- 2011377975 description "Includes bibliographical references and author index.".
- 2011377975 extent "1 v. (various pagings) :".
- 2011377975 identifier "0819484636".
- 2011377975 identifier "9780819484635".
- 2011377975 isPartOf "Proceedings of SPIE, 0277-786X ; v. 7926".
- 2011377975 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 7926. 0277-786X".
- 2011377975 issued "2011".
- 2011377975 issued "c2011.".
- 2011377975 language "eng".
- 2011377975 publisher "Bellingham, Wash. : SPIE,".
- 2011377975 subject "671.3/5 23".
- 2011377975 subject "Electromechanical devices Design and construction Congresses.".
- 2011377975 subject "Microfabrication Congresses.".
- 2011377975 subject "Micromachining Congresses.".
- 2011377975 subject "Miniature electronic equipment Design and construction Congresses.".
- 2011377975 subject "TJ1191.5 .M55243236 2011".
- 2011377975 title "Micromachining and microfabrication process technology XVI : 25 and 27 January 2011, San Francisco, California, United States / Mary Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored ... by SPIE.".
- 2011377975 type "text".