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- 2011499486 contributor B12364717.
- 2011499486 contributor B12364718.
- 2011499486 created "c2011.".
- 2011499486 date "2011".
- 2011499486 date "c2011.".
- 2011499486 dateCopyrighted "c2011.".
- 2011499486 description "Includes bibliographical references and index.".
- 2011499486 extent "2 v. :".
- 2011499486 identifier "0819486051 (pbk.)".
- 2011499486 identifier "9780819486059 (pbk.)".
- 2011499486 isPartOf "Proceedings of SPIE ; v. 8031".
- 2011499486 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 8031.".
- 2011499486 issued "2011".
- 2011499486 issued "c2011.".
- 2011499486 language "eng".
- 2011499486 publisher "Bellingham, Wash. : SPIE,".
- 2011499486 subject "621.381 23".
- 2011499486 subject "Microelectromechanical systems Congresses.".
- 2011499486 subject "Nanoelectromechanical systems Congresses.".
- 2011499486 subject "Nanoelectronics Congresses.".
- 2011499486 subject "Nanophotonics Congresses.".
- 2011499486 subject "Nanotechnology Congresses.".
- 2011499486 subject "TK7874.84 .M533 2011".
- 2011499486 title "Micro- and nanotechnology sensors, systems, and applications III : 25-29 April 2011, Orlando, Florida, United States / Thomas George, M. Saif Islam, Achyut K. Dutta, editors ; sponsored and published by SPIE.".
- 2011499486 type "text".