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- 2011920685 contributor B12412838.
- 2011920685 created "c2011.".
- 2011920685 date "2011".
- 2011920685 date "c2011.".
- 2011920685 dateCopyrighted "c2011.".
- 2011920685 description "Includes bibliographical references and index.".
- 2011920685 extent "xiii, 204 p. :".
- 2011920685 identifier "1441957596 (hdbk. : acid-free paper)".
- 2011920685 identifier "9781441957597 (hdbk. : acid-free paper)".
- 2011920685 issued "2011".
- 2011920685 issued "c2011.".
- 2011920685 language "eng".
- 2011920685 publisher "New York ; London : Springer,".
- 2011920685 subject "621.381 22".
- 2011920685 subject "Microelectromechanical systems.".
- 2011920685 subject "Microtechnology Reliability.".
- 2011920685 subject "Microtechnology.".
- 2011920685 subject "Nanotechnology.".
- 2011920685 subject "TK7875 .R4374 2011".
- 2011920685 title "Reliability of microtechnology : interconnects, devices, and systems / Johan Liu ... [et al.].".
- 2011920685 type "text".