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- 2011920981 contributor B12412987.
- 2011920981 created "2012.".
- 2011920981 date "2012".
- 2011920981 date "2012.".
- 2011920981 dateCopyrighted "2012.".
- 2011920981 description "Includes bibliographical references.".
- 2011920981 extent "xxii, 1004 p. :".
- 2011920981 identifier "3642182925".
- 2011920981 identifier "7302243077".
- 2011920981 identifier "9783642182921".
- 2011920981 identifier "9787302243076".
- 2011920981 identifier 2011920981-b.html.
- 2011920981 identifier 2011920981-d.html.
- 2011920981 identifier 2011920981-t.html.
- 2011920981 issued "2012".
- 2011920981 issued "2012.".
- 2011920981 language "eng".
- 2011920981 publisher "Beijing : Tsinghua University Press ; Berlin : Springer,".
- 2011920981 subject "Microelectromechanical systems.".
- 2011920981 subject "Nanotechnology.".
- 2011920981 subject "TK7875 .M57 2012".
- 2011920981 title "Microsystems and nanotechnology / Zhaoying Zhou, Zhonglin Wang, Liwei Lin, [editors].".
- 2011920981 type "text".