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- 2011921730 contributor B12413399.
- 2011921730 created "c2011.".
- 2011921730 date "2011".
- 2011921730 date "c2011.".
- 2011921730 dateCopyrighted "c2011.".
- 2011921730 description "Includes bibliographical references and index.".
- 2011921730 description "The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etching for micromachining applications -- MEMS wet-etch processes and procedures -- MEMS lithography and micromachining techniques -- Doping processes for MEMS -- Wafer bonding -- MEMS packaging materials -- Surface treatment and planarization -- MEMS process integration.".
- 2011921730 extent "xxxv, 1187 p. :".
- 2011921730 identifier "0387473165 (hbk.)".
- 2011921730 identifier "9780387473161 (hbk.)".
- 2011921730 isPartOf "MEMS reference shelf".
- 2011921730 isPartOf "MEMS reference shelf.".
- 2011921730 issued "2011".
- 2011921730 issued "c2011.".
- 2011921730 language "eng".
- 2011921730 publisher "New York ; London : Springer,".
- 2011921730 subject "621.381 22".
- 2011921730 subject "Microelectromechanical systems Materials.".
- 2011921730 subject "Microelectromechanical systems.".
- 2011921730 subject "TJ163 .M46 2011".
- 2011921730 tableOfContents "The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etching for micromachining applications -- MEMS wet-etch processes and procedures -- MEMS lithography and micromachining techniques -- Doping processes for MEMS -- Wafer bonding -- MEMS packaging materials -- Surface treatment and planarization -- MEMS process integration.".
- 2011921730 title "MEMS materials and processes handbook / Reza Ghodssi, Pinyen Lin, editors.".
- 2011921730 type "text".