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- 2011923525 contributor B12414301.
- 2011923525 created "c2011.".
- 2011923525 date "2011".
- 2011923525 date "c2011.".
- 2011923525 dateCopyrighted "c2011.".
- 2011923525 description "Includes bibliographical references and index.".
- 2011923525 extent "xii, 444 p. :".
- 2011923525 identifier "3642129021".
- 2011923525 identifier "9783642129025".
- 2011923525 identifier 2011923525-d.html.
- 2011923525 identifier 2011923525-t.html.
- 2011923525 isPartOf "Microtechnology and MEMS, 1615-8326".
- 2011923525 isPartOf "Microtechnology and MEMS.".
- 2011923525 issued "2011".
- 2011923525 issued "c2011.".
- 2011923525 language "eng".
- 2011923525 publisher "Heidelberg, [Germany] : Springer,".
- 2011923525 subject "621.381 22".
- 2011923525 subject "Microelectromechanical systems.".
- 2011923525 subject "Microelectronics.".
- 2011923525 subject "TK7874 .D4744 2011".
- 2011923525 title "Design and manufacturing of active microsystems / Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors.".
- 2011923525 type "text".