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- 2011928695 contributor B12417144.
- 2011928695 contributor B12417145.
- 2011928695 created "c2011.".
- 2011928695 date "2011".
- 2011928695 date "c2011.".
- 2011928695 dateCopyrighted "c2011.".
- 2011928695 description "Includes bibliographical references and index.".
- 2011928695 extent "xv, 232 p. :".
- 2011928695 identifier "1441971203 (hdbk. : acid-free paper)".
- 2011928695 identifier "1441971211 (ebk.)".
- 2011928695 identifier "9781441971203 (hdbk. : acid-free paper)".
- 2011928695 identifier "9781441971210 (ebk.)".
- 2011928695 isPartOf "MEMS reference shelf".
- 2011928695 isPartOf "MEMS reference shelf.".
- 2011928695 issued "2011".
- 2011928695 issued "c2011.".
- 2011928695 language "eng".
- 2011928695 publisher "New York : Springer,".
- 2011928695 subject "Microelectromechanical systems.".
- 2011928695 subject "Silicon carbide.".
- 2011928695 subject "TK7875 .S56 2011".
- 2011928695 title "Silicon carbide microsystems for harsh environments / Muthu B.J. Wijesundara, Robert G. Azevedo.".
- 2011928695 type "text".