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- 2012013231 contributor B12442346.
- 2012013231 created "c2012.".
- 2012013231 date "2012".
- 2012013231 date "c2012.".
- 2012013231 dateCopyrighted "c2012.".
- 2012013231 description "Includes bibliographical references and index.".
- 2012013231 description "Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary -- Index.".
- 2012013231 extent "xxx, 664 p. :".
- 2012013231 identifier "081949092X".
- 2012013231 identifier "9780819490926".
- 2012013231 issued "2012".
- 2012013231 issued "c2012.".
- 2012013231 language "eng".
- 2012013231 publisher "Bellingham, Wash. : SPIE,".
- 2012013231 subject "621.3815/2 23".
- 2012013231 subject "Semiconductor industry.".
- 2012013231 subject "Semiconductors Design and construction.".
- 2012013231 subject "TK7871.85 .X53 2012".
- 2012013231 tableOfContents "Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary -- Index.".
- 2012013231 title "Introduction to semiconductor technology / Hong Xiao.".
- 2012013231 type "text".