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- 2012021830 contributor B12452418.
- 2012021830 contributor B12452419.
- 2012021830 date "2013".
- 2012021830 description "Includes bibliographical references and index.".
- 2012021830 description "Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS.".
- 2012021830 extent "xx, 559 pages :".
- 2012021830 identifier "9780521764834 (hardback)".
- 2012021830 issued "2013".
- 2012021830 language "eng".
- 2012021830 subject "621.381 23".
- 2012021830 subject "Microelectromechanical systems.".
- 2012021830 subject "TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics. bisacsh".
- 2012021830 subject "TK7875 .J66 2013".
- 2012021830 tableOfContents "Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS.".
- 2012021830 title "Electromechanics and MEMS / Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology.".
- 2012021830 type "text".