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- 2012037066 contributor B12469905.
- 2012037066 date "2013".
- 2012037066 description "Includes bibliographical references and index.".
- 2012037066 extent "xiv, 671 pages 24 cm.".
- 2012037066 identifier "9780199861224 (pbk.)".
- 2012037066 isPartOf "The Oxford series in electrical and computer engineering".
- 2012037066 issued "2013".
- 2012037066 language "eng".
- 2012037066 subject "621.3815/2 23".
- 2012037066 subject "Semiconductors Design and construction.".
- 2012037066 subject "TK7871.85 .C25 2013".
- 2012037066 title "Fabrication engineering at the micro- and nanoscale / Stephen A Campbell, University of Minnesota.".
- 2012037066 type "text".