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- 2012360919 contributor B12533537.
- 2012360919 created "c2012.".
- 2012360919 date "2012".
- 2012360919 date "c2012.".
- 2012360919 dateCopyrighted "c2012.".
- 2012360919 description "Includes bibliographical references and index.".
- 2012360919 extent "xii, 229 p. :".
- 2012360919 identifier "1608070840".
- 2012360919 identifier "9781608070848".
- 2012360919 isPartOf "Artech House integrated microsystems series".
- 2012360919 isPartOf "Artech House integrated microsystems series.".
- 2012360919 issued "2012".
- 2012360919 issued "c2012.".
- 2012360919 language "eng".
- 2012360919 publisher "Boston : Artech House,".
- 2012360919 subject "Microelectromechanical systems.".
- 2012360919 subject "TK7875 .N54 2012".
- 2012360919 title "Cost-driven design of smart microsystems / Michael Niedermayer.".
- 2012360919 type "text".