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- 2012471865 contributor B12635456.
- 2012471865 contributor B12635457.
- 2012471865 created "c2012.".
- 2012471865 date "2012".
- 2012471865 date "c2012.".
- 2012471865 dateCopyrighted "c2012.".
- 2012471865 description "Includes bibliographical references and index.".
- 2012471865 extent "1 v. (various pagings) :".
- 2012471865 identifier "0819489832".
- 2012471865 identifier "9780819489838".
- 2012471865 isPartOf "Proceedings of SPIE, 0277-786X ; v. 8327".
- 2012471865 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 8327. 0277-786X".
- 2012471865 issued "2012".
- 2012471865 issued "c2012.".
- 2012471865 language "eng".
- 2012471865 publisher "Bellingham, Wash. : SPIE,".
- 2012471865 subject "Integrated circuits Defects Analysis Congresses.".
- 2012471865 subject "Integrated circuits Design and construction Congresses.".
- 2012471865 subject "Microelectronics industry Quality control Congresses.".
- 2012471865 subject "QC371 .S67 v. 8327".
- 2012471865 subject "Quality control Congresses.".
- 2012471865 subject "Semiconductor wafers Defects Analysis Congresses.".
- 2012471865 subject "Semiconductors Design and construction Congresses.".
- 2012471865 subject "TK7874 .D474978 2012".
- 2012471865 title "Design for manufacturability through design-process integration VI : 15-16 February 2012, San Jose, California, United States / Mark E. Mason, John L. Sturtevant, editors ; sponsored ... by SPIE.".
- 2012471865 type "text".