Matches in Library of Congress for { <http://lccn.loc.gov/2013016681> ?p ?o. }
Showing items 1 to 22 of
22
with 100 items per page.
- 2013016681 contributor B12723480.
- 2013016681 contributor B12723481.
- 2013016681 date "2013".
- 2013016681 description "Description based on print version record and CIP data provided by publisher; resource not viewed.".
- 2013016681 description "Includes bibliographical references and index.".
- 2013016681 extent "1 online resource.".
- 2013016681 hasFormat "Atomic layer deposition".
- 2013016681 identifier "9781118747346 ( mobi)".
- 2013016681 identifier "9781118747384 (epub)".
- 2013016681 identifier "9781118747421 (pdf)".
- 2013016681 isFormatOf "Atomic layer deposition".
- 2013016681 issued "2013".
- 2013016681 language "eng".
- 2013016681 relation "Atomic layer deposition".
- 2013016681 subject "620/.5 23".
- 2013016681 subject "Chemical vapor deposition.".
- 2013016681 subject "Epitaxy.".
- 2013016681 subject "Microelectronics.".
- 2013016681 subject "Nanotechnology.".
- 2013016681 subject "TS695".
- 2013016681 title "Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.".
- 2013016681 type "text".