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- 75183177 contributor B2623532.
- 75183177 contributor B2623533.
- 75183177 created "1971.".
- 75183177 date "1971".
- 75183177 date "1971.".
- 75183177 dateCopyrighted "1971.".
- 75183177 description "Includes bibliographical references.".
- 75183177 extent "506 p.".
- 75183177 identifier "3540056661".
- 75183177 issued "1971".
- 75183177 issued "1971.".
- 75183177 language "eng".
- 75183177 publisher "Berlin, New York, Springer-Verlag,".
- 75183177 subject "621.3815/2".
- 75183177 subject "Ion implantation Congresses.".
- 75183177 subject "Semiconductors Congresses.".
- 75183177 subject "TK7871.85 .I576 1971".
- 75183177 title "Ion implantation in semiconductors; proceedings. Edited by I. Ruge and J. Graul.".
- 75183177 type "text".