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- 75312593 contributor B2645864.
- 75312593 contributor B2645865.
- 75312593 created "c1974.".
- 75312593 date "1974".
- 75312593 date "c1974.".
- 75312593 dateCopyrighted "c1974.".
- 75312593 description "Includes bibliographical references and index.".
- 75312593 extent "xx, 871 p. :".
- 75312593 isPartOf "Japanese Journal of Applied Physics : Supplement ; 2, pt. 1".
- 75312593 issued "1974".
- 75312593 issued "c1974.".
- 75312593 language "eng".
- 75312593 publisher "Tokyo : Japanese Journal of Applied Physics,".
- 75312593 subject "621.5/5".
- 75312593 subject "TJ940 .I64 1974".
- 75312593 subject "Vacuum technology Congresses.".
- 75312593 title "Proceedings of the sixth International Vacuum Congress, March 25-29, 1974, Kyoto International Conference Hall, Kyoto, Japan / sponsored by International Union for Vacuum Science, Technique and Applications ; hosted by the Vacuum Society of Japan.".
- 75312593 type "text".