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- 75619190 contributor B2787990.
- 75619190 created "1975.".
- 75619190 date "1975".
- 75619190 date "1975.".
- 75619190 dateCopyrighted "1975.".
- 75619190 description "Bibliography: p. 31-36.".
- 75619190 extent "iv, 36 p. :".
- 75619190 isPartOf "NBS special publication ; 400-20".
- 75619190 isPartOf "NBS special publication ; 400-20.".
- 75619190 isPartOf "Semiconductor measurement technology".
- 75619190 issued "1975".
- 75619190 issued "1975.".
- 75619190 language "eng".
- 75619190 publisher "Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.,".
- 75619190 subject "389/.08 s 621.381/73".
- 75619190 subject "Integrated circuits Masks.".
- 75619190 subject "Optical measurements.".
- 75619190 subject "Photolithography.".
- 75619190 subject "QC100 .U57 no. 400-20 TK7874".
- 75619190 title "Optical and dimensional-measurement problems with photomasking in microelectronics / John M. Jerke.".
- 75619190 type "text".