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- 76009231 contributor B2821039.
- 76009231 contributor B2821040.
- 76009231 contributor B2821041.
- 76009231 created "c1976.".
- 76009231 date "1976".
- 76009231 date "c1976.".
- 76009231 dateCopyrighted "c1976.".
- 76009231 description "Includes bibliographical references and index.".
- 76009231 extent "vi, 203 p. :".
- 76009231 issued "1976".
- 76009231 issued "c1976.".
- 76009231 language "eng".
- 76009231 publisher "Princeton, N.J. : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society,".
- 76009231 subject "621.3815/2".
- 76009231 subject "Integrated circuits Congresses.".
- 76009231 subject "Metals Etching Congresses.".
- 76009231 subject "Semiconductors Etching Congresses.".
- 76009231 subject "TK7836 .S94 1976".
- 76009231 title "Proceedings of the Symposium on Etching for Pattern Definition / edited by Henry G. Hughes, Myron J. Rand.".
- 76009231 type "text".