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- 76600032%2F%2Fr85 alternative "Microelectronic test pattern NBS-3 ...".
- 76600032%2F%2Fr85 contributor B2988040.
- 76600032%2F%2Fr85 created "1976.".
- 76600032%2F%2Fr85 date "1976".
- 76600032%2F%2Fr85 date "1976.".
- 76600032%2F%2Fr85 dateCopyrighted "1976.".
- 76600032%2F%2Fr85 description "Includes bibliographical references.".
- 76600032%2F%2Fr85 extent "vi, 49 p. :".
- 76600032%2F%2Fr85 isPartOf "NBS special publication ; 400-22".
- 76600032%2F%2Fr85 isPartOf "NBS special publication ; 400-22.".
- 76600032%2F%2Fr85 isPartOf "Semiconductor measurement technology".
- 76600032%2F%2Fr85 issued "1976".
- 76600032%2F%2Fr85 issued "1976.".
- 76600032%2F%2Fr85 language "eng".
- 76600032%2F%2Fr85 publisher "[Washington] : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.,".
- 76600032%2F%2Fr85 subject "602/.1 s 621.3815/2/028".
- 76600032%2F%2Fr85 subject "Microelectronics.".
- 76600032%2F%2Fr85 subject "QC100 .U57 no. 400-22 TK7871.85".
- 76600032%2F%2Fr85 subject "Semiconductors Testing.".
- 76600032%2F%2Fr85 subject "Silicon Testing.".
- 76600032%2F%2Fr85 title "Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon / Martin G. Buehler.".
- 76600032%2F%2Fr85 type "text".