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- 76608408 contributor B2993013.
- 76608408 contributor B2993014.
- 76608408 created "1977.".
- 76608408 date "1977".
- 76608408 date "1977.".
- 76608408 dateCopyrighted "1977.".
- 76608408 extent "vii, 64 p. :".
- 76608408 isPartOf "NBS special publication ; 400-24".
- 76608408 isPartOf "NBS special publication ; 400-24.".
- 76608408 isPartOf "Semiconductor measurement technology".
- 76608408 issued "1977".
- 76608408 issued "1977.".
- 76608408 language "eng".
- 76608408 publisher "Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.,".
- 76608408 subject "602/.1 s 621.3815/48".
- 76608408 subject "Optical scanners.".
- 76608408 subject "QC100 .U57 no. 400-24 TK7882.S3".
- 76608408 subject "Semiconductor industry Laser use in.".
- 76608408 subject "Semiconductors Testing.".
- 76608408 title "A laser scanner for semiconductor devices / David E. Sawyer and David W. Berning.".
- 76608408 type "text".