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- 78010624 contributor B3258577.
- 78010624 created "1978.".
- 78010624 date "1978".
- 78010624 date "1978.".
- 78010624 dateCopyrighted "1978.".
- 78010624 description "Includes bibliographical references.".
- 78010624 extent "vii, 54 p. :".
- 78010624 isPartOf "NBS special publication ; 400-49".
- 78010624 isPartOf "NBS special publication ; 400-49.".
- 78010624 isPartOf "Semiconductor measurement technology".
- 78010624 issued "1978".
- 78010624 issued "1978.".
- 78010624 language "eng".
- 78010624 publisher "[Washington] : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.,".
- 78010624 subject "602/.1 s 621.3815/2/028".
- 78010624 subject "Integrated circuits.".
- 78010624 subject "Ion implantation.".
- 78010624 subject "QC100 .U57 no. 400-49 TK7871.85".
- 78010624 subject "Semiconductor doping.".
- 78010624 title "Angular sensitivity of controlled implanted doping profiles / Robert G. Wilson ... [et al.].".
- 78010624 type "text".