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- 78381884 contributor B3409828.
- 78381884 contributor B3409829.
- 78381884 created "1978.".
- 78381884 date "1978".
- 78381884 date "1978.".
- 78381884 dateCopyrighted "1978.".
- 78381884 description "Bibliography: p. [344]-360.".
- 78381884 extent "366 p. ;".
- 78381884 identifier "3519032066 :".
- 78381884 issued "1978".
- 78381884 issued "1978.".
- 78381884 language "ger".
- 78381884 publisher "Stuttgart : Teubner,".
- 78381884 subject "621.3815/2/028".
- 78381884 subject "Ion implantation.".
- 78381884 subject "Semiconductors.".
- 78381884 subject "TK7871.85 .R97".
- 78381884 title "Ionenimplantation / von Heiner Ryssel u. Ingolf Ruge.".
- 78381884 type "text".