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- 78606023 contributor B3455290.
- 78606023 contributor B3455291.
- 78606023 created "1978.".
- 78606023 date "1978".
- 78606023 date "1978.".
- 78606023 dateCopyrighted "1978.".
- 78606023 description "Includes bibliographical references.".
- 78606023 extent "vi, 31 p. :".
- 78606023 isPartOf "NBS special publication ; 400-46".
- 78606023 isPartOf "NBS special publication ; 400-46.".
- 78606023 isPartOf "Semiconductor measurement technology".
- 78606023 issued "1978".
- 78606023 issued "1978.".
- 78606023 language "eng".
- 78606023 publisher "Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.,".
- 78606023 subject "602/.1 s 621.381/73/028".
- 78606023 subject "Integrated circuits Masks Testing.".
- 78606023 subject "Optical instruments.".
- 78606023 subject "QC100 .U57 no. 400-46 TK7874".
- 78606023 title "Automated photomask inspection / Donald B. Novotny and Dino R. Ciarlo.".
- 78606023 type "text".