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- 79008856 contributor B3492849.
- 79008856 created "1980.".
- 79008856 date "1980".
- 79008856 date "1980.".
- 79008856 dateCopyrighted "1980.".
- 79008856 description "Includes bibliographies and index.".
- 79008856 extent "xi, 362 p. :".
- 79008856 identifier "012133550X :".
- 79008856 issued "1980".
- 79008856 issued "1980.".
- 79008856 language "eng".
- 79008856 publisher "New York : Academic Press,".
- 79008856 subject "621.381/7".
- 79008856 subject "Lithography, Electron beam.".
- 79008856 subject "Microelectronics.".
- 79008856 subject "TK7874 .E48".
- 79008856 title "Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]".
- 79008856 type "text".