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- 80013154 contributor B3739726.
- 80013154 created "1980.".
- 80013154 date "1980".
- 80013154 date "1980.".
- 80013154 dateCopyrighted "1980.".
- 80013154 description "Includes bibliographies and index.".
- 80013154 extent "vii, 481 p. ;".
- 80013154 identifier "0444853510".
- 80013154 isPartOf "Materials processing, theory and practices ; v. 1".
- 80013154 issued "1980".
- 80013154 issued "1980.".
- 80013154 language "eng".
- 80013154 publisher "Amsterdam ; New York : North-Holland Pub. Co. ; New York : sole distributor for the USA and Canada, Elsevier North-Holland,".
- 80013154 subject "621.381/73".
- 80013154 subject "Integrated circuits Large scale integration.".
- 80013154 subject "Lithography.".
- 80013154 subject "TK7874 .F56".
- 80013154 title "Fine line lithography / edited by Roger Newman.".
- 80013154 type "text".