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- 80600054%2F%2Fr85 contributor B3915782.
- 80600054%2F%2Fr85 created "1980.".
- 80600054%2F%2Fr85 date "1980".
- 80600054%2F%2Fr85 date "1980.".
- 80600054%2F%2Fr85 dateCopyrighted "1980.".
- 80600054%2F%2Fr85 description "Includes bibliographical references.".
- 80600054%2F%2Fr85 extent "vi, 34 p. :".
- 80600054%2F%2Fr85 isPartOf "NBS special publication ; 400-61".
- 80600054%2F%2Fr85 isPartOf "NBS special publication ; 400-61.".
- 80600054%2F%2Fr85 isPartOf "Semiconductor measurement technology".
- 80600054%2F%2Fr85 issued "1980".
- 80600054%2F%2Fr85 issued "1980.".
- 80600054%2F%2Fr85 language "eng".
- 80600054%2F%2Fr85 publisher "Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.,".
- 80600054%2F%2Fr85 subject "602/.18 s 621.381/73/0287 19".
- 80600054%2F%2Fr85 subject "Integrated circuits Measurement.".
- 80600054%2F%2Fr85 subject "Integrated circuits Testing.".
- 80600054%2F%2Fr85 subject "QC100 .U57 no. 400-61 TK7874".
- 80600054%2F%2Fr85 subject "Semiconductors Measurement.".
- 80600054%2F%2Fr85 subject "Semiconductors Testing.".
- 80600054%2F%2Fr85 title "Metrology for submicrometer devices and circuits / W. Murray Bullis.".
- 80600054%2F%2Fr85 type "text".