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- 81002877%2F%2Fr864 contributor B3944085.
- 81002877%2F%2Fr864 created "1981-c1993.".
- 81002877%2F%2Fr864 date "1981".
- 81002877%2F%2Fr864 date "1981-c1993.".
- 81002877%2F%2Fr864 dateCopyrighted "1981-c1993.".
- 81002877%2F%2Fr864 description "Includes bibliographies and indexes.".
- 81002877%2F%2Fr864 description "v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices -- v. 14. VLSI design -- v. 15. VLSI metallization -- v. 16. Lithography for VLSI -- v. 17. VLSI in medicine -- v.18. Advanced MOS device physics -- 19. Advanced CMOS process technology -- v. 21. Beam processing technologies -- v. 22. VLSI reliability -- v. 23. Application specific integrated circuit (ASIC) technology -- v. 24. Heterostructures and quantum devices.".
- 81002877%2F%2Fr864 extent "v. <1-19, 21-24> :".
- 81002877%2F%2Fr864 identifier "0122341015 (v. 1 : alk. paper)".
- 81002877%2F%2Fr864 issued "1981".
- 81002877%2F%2Fr864 issued "1981-c1993.".
- 81002877%2F%2Fr864 language "eng".
- 81002877%2F%2Fr864 publisher "New York : Academic Press,".
- 81002877%2F%2Fr864 subject "621.395 s 19".
- 81002877%2F%2Fr864 subject "Integrated circuits Very large scale integration.".
- 81002877%2F%2Fr864 subject "TK7874 .V56".
- 81002877%2F%2Fr864 tableOfContents "v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices -- v. 14. VLSI design -- v. 15. VLSI metallization -- v. 16. Lithography for VLSI -- v. 17. VLSI in medicine -- v.18. Advanced MOS device physics -- 19. Advanced CMOS process technology -- v. 21. Beam processing technologies -- v. 22. VLSI reliability -- v. 23. Application specific integrated circuit (ASIC) technology -- v. 24. Heterostructures and quantum devices.".
- 81002877%2F%2Fr864 title "VLSI electronics : microstructure science / edited by Norman G. Einspruch.".
- 81002877%2F%2Fr864 type "text".