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- 81004313 alternative "Particle bombardment.".
- 81004313 contributor B3945878.
- 81004313 created "1981-c1991.".
- 81004313 date "1981".
- 81004313 date "1981-c1991.".
- 81004313 dateCopyrighted "1981-c1991.".
- 81004313 description "1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.".
- 81004313 description "Includes bibliographical references and indexes.".
- 81004313 extent "3 v. :".
- 81004313 identifier "0387105212 (v. 1 : U.S.)".
- 81004313 isPartOf "Topics in applied physics ; v. 47, 52, 64".
- 81004313 issued "1981".
- 81004313 issued "1981-c1991.".
- 81004313 language "eng".
- 81004313 publisher "Berlin ; New York : Springer-Verlag,".
- 81004313 subject "530.4/1 19".
- 81004313 subject "QC176.8.S72 S68".
- 81004313 subject "Solids Effect of radiation on.".
- 81004313 subject "Sputtering (Physics)".
- 81004313 subject "Surfaces (Physics) Effect of radiation on.".
- 81004313 tableOfContents "1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.".
- 81004313 title "Sputtering by particle bombardment / edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].".
- 81004313 type "text".