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- 81051405%2F%2Fr853 contributor B3974637.
- 81051405%2F%2Fr853 contributor B3974638.
- 81051405%2F%2Fr853 created "c1981.".
- 81051405%2F%2Fr853 date "1981".
- 81051405%2F%2Fr853 date "c1981.".
- 81051405%2F%2Fr853 dateCopyrighted "c1981.".
- 81051405%2F%2Fr853 description "Includes bibliographical references and indexes.".
- 81051405%2F%2Fr853 extent "vi, 221 p. :".
- 81051405%2F%2Fr853 identifier "0892523085 (pbk.)".
- 81051405%2F%2Fr853 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 275".
- 81051405%2F%2Fr853 issued "1981".
- 81051405%2F%2Fr853 issued "c1981.".
- 81051405%2F%2Fr853 language "eng".
- 81051405%2F%2Fr853 publisher "Bellingham, Wash. : SPIE--the International Society for Optical Engineering,".
- 81051405%2F%2Fr853 subject "621.381/73 19".
- 81051405%2F%2Fr853 subject "Microlithography Congresses.".
- 81051405%2F%2Fr853 subject "Semiconductors Congresses.".
- 81051405%2F%2Fr853 subject "TK7871.85 .S466".
- 81051405%2F%2Fr853 title "Semiconductor microlithography VI : March 30-31, 1981, San Jose, California / Jim Dey, editor.".
- 81051405%2F%2Fr853 type "text".