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- 81600003 contributor B4141289.
- 81600003 contributor B4141290.
- 81600003 created "1981.".
- 81600003 date "1981".
- 81600003 date "1981.".
- 81600003 dateCopyrighted "1981.".
- 81600003 description "Includes bibliographical references.".
- 81600003 extent "vi, 46 p. :".
- 81600003 isPartOf "NBS special publication : 400-67".
- 81600003 isPartOf "Semiconductor measurement technology".
- 81600003 issued "1981".
- 81600003 issued "1981.".
- 81600003 language "eng".
- 81600003 publisher "Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards,".
- 81600003 subject "602/.18 s 537.6/22/0287 19".
- 81600003 subject "Auger electron spectroscopy.".
- 81600003 subject "QC100 .U57 no. 400-67 TK7871.85".
- 81600003 subject "Semiconductors Testing.".
- 81600003 subject "Sputtering (Physics)".
- 81600003 title "The Capabilities and limitations of auger sputter profiling for studies of semiconductors / S.A Schwarz ... [et al.] ; sponsored by the Defense Advanced Research Projects Agency.".
- 81600003 type "text".