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- 81600078 contributor B4141415.
- 81600078 contributor B4141416.
- 81600078 created "1981.".
- 81600078 date "1981".
- 81600078 date "1981.".
- 81600078 dateCopyrighted "1981.".
- 81600078 description "Includes bibliographical references.".
- 81600078 extent "v, 142 p. :".
- 81600078 isPartOf "NBS special publication ; 400-66".
- 81600078 isPartOf "Semiconductor measurement technology".
- 81600078 issued "1981".
- 81600078 issued "1981.".
- 81600078 language "eng".
- 81600078 publisher "Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O.,".
- 81600078 subject "602/.18 s 621.381/73/0287 19".
- 81600078 subject "Integrated circuits Testing.".
- 81600078 subject "QC100 .U57 no. 400-66 TK7874".
- 81600078 title "The design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control / Loren W. Linholm ; sponsored by U.S. Air Force ... [et al.].".
- 81600078 type "text".