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- 82003835%2F%2Fr97 contributor B4169673.
- 82003835%2F%2Fr97 contributor B4169674.
- 82003835%2F%2Fr97 created "c1982.".
- 82003835%2F%2Fr97 date "1982".
- 82003835%2F%2Fr97 date "c1982.".
- 82003835%2F%2Fr97 dateCopyrighted "c1982.".
- 82003835%2F%2Fr97 description "Includes bibliographical references and index.".
- 82003835%2F%2Fr97 extent "xix, 503 p. :".
- 82003835%2F%2Fr97 identifier "0306408635".
- 82003835%2F%2Fr97 issued "1982".
- 82003835%2F%2Fr97 issued "c1982.".
- 82003835%2F%2Fr97 language "eng".
- 82003835%2F%2Fr97 publisher "New York : Plenum Press,".
- 82003835%2F%2Fr97 subject "621.381/7 19".
- 82003835%2F%2Fr97 subject "Microelectronics.".
- 82003835%2F%2Fr97 subject "Microfabrication.".
- 82003835%2F%2Fr97 subject "TK7874 .B73 1982".
- 82003835%2F%2Fr97 subject "Thin-film circuits.".
- 82003835%2F%2Fr97 title "The physics of microfabrication / Ivor Brodie and Julius J. Muray.".
- 82003835%2F%2Fr97 type "text".