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- 82010842 alternative "V.L.S.I. fabrication principles.".
- 82010842 contributor B4178496.
- 82010842 created "c1983.".
- 82010842 date "1983".
- 82010842 date "c1983.".
- 82010842 dateCopyrighted "c1983.".
- 82010842 description "Includes bibliographical references and index.".
- 82010842 extent "xi, 665 p. :".
- 82010842 identifier "0471868337 :".
- 82010842 identifier 82010842-d.html.
- 82010842 identifier 82010842-t.html.
- 82010842 issued "1983".
- 82010842 issued "c1983.".
- 82010842 language "eng".
- 82010842 publisher "New York : Wiley,".
- 82010842 subject "621.381/71 19".
- 82010842 subject "Gallium arsenide.".
- 82010842 subject "Integrated circuits Very large scale integration.".
- 82010842 subject "Silicon.".
- 82010842 subject "TK7874 .G473 1983".
- 82010842 title "VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi.".
- 82010842 type "text".