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- 82013748 contributor B4182163.
- 82013748 created "1983.".
- 82013748 date "1983".
- 82013748 date "1983.".
- 82013748 dateCopyrighted "1983.".
- 82013748 extent "viii, 151 p. :".
- 82013748 identifier "0126747806".
- 82013748 identifier 82013748.html.
- 82013748 identifier 82013748.html.
- 82013748 issued "1983".
- 82013748 issued "1983.".
- 82013748 language "eng".
- 82013748 publisher "New York : Academic Press,".
- 82013748 subject "621.5/5 19".
- 82013748 subject "Cathode sputtering (Plating process)".
- 82013748 subject "TP156.V3 S78 1983".
- 82013748 subject "Thin films.".
- 82013748 subject "Vacuum technology.".
- 82013748 title "Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.".
- 82013748 type "text".